Statistical limitations of printing 50 and 80 nm contact holes by EUV lithography

Conference paper

10 Dec 2003

Abstract

No abstract available.

Conference paper

Corneliu Constantinescu

SPIE Optical Engineering + Applications 2009

Paper

K.N. Tu

Materials Science and Engineering: A

Paper

P. Alnot, D.J. Auerbach, et al.

Surface Science

Paper

O.F. Schirmer, K.W. Blazey, et al.

Physical Review B