Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A series of semifluorinated n-alkanes, F(CF2)n(CH2)mH, have been observed to undergo a solid–solid phase transition below the crystal melting point. Characterization of this transition has been achieved by a combination of differential scanning calorimetry, Raman spectroscopy, small-angle X-ray scattering, and wide-angle X-ray diffraction. For compounds where n = 12 and m = 2, 4, or 6 the molecular axes are tilted with respect to the crystal surface normal prior to the transition. For compounds where n = 12 and m = 8, 10, or 12 evidence for a tilted bilayered crystal structure below the transition temperature was found. The transition involves a translation of the molecules along their axes via a simple screw motion whereupon they enter a rotator phase prior to melting similar to that found in n-alkanes. © 1986, American Chemical Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME