Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Hydroxyether linked copolymers were synthesized from α,ω-bis(aminopropyl)polydimethyl diphenylsiloxane oligomers and diglydicylether of bisphenol-A (DGEBA). The siloxane oligomers were synthesized by the bulk coequilibration of the various weight percents cyclic dimethylsiloxane tetramer (D4) with cyclic diphenylsiloxane tetramer (D4″) using a basic catalyst. The molecular weight and functionality was controlled by the incorporation of 1,3-bis(aminopropyl)-tetramethyldisiloxane end blocker. The copolymers containing low diphenylsiloxane compositions have two Tg's suggesting a microphase separation. Networks containing higher diphenylsiloxane compositions show a single phase morphology. The mechanical behavior of these copolymers is influenced by the composition changes. © 1988 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
R.W. Gammon, E. Courtens, et al.
Physical Review B
M.A. Lutz, R.M. Feenstra, et al.
Surface Science