Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have measured 4f core-level shifts and surface-to-bulk intensity ratios for surface atoms on the Au(111), (100) and (110) faces. These shifts show crystallographic dependences as well as dependences on surface reconstruction. For the reconstructed Au(110)-(2x1) surface, our data are consistent with a relaxed missing row model and exclude an unrelaxed missing row model. The Au(100)-(5x20) reconstructed surface gives surface core-level shifts and intensity ratios which are consistent with a buckled hexagonal overlayer model with surface relaxation. © 1981.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
J.A. Barker, D. Henderson, et al.
Molecular Physics