William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Paper
Structure of the Si(111)/CaF2 interface
Abstract
The structure of the Si(111)-CaF2 interface has been determined with medium-energy ion scattering and high-resolution transmission electron microscopy. The interface structure is closely related to the bulk crystal structure of CaSi2. The interface is deficient in F, resulting in Si-Ca bonding and a charge-neutral interface. © 1989, American Vacuum Society. All rights reserved.
Related
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
John G. Long, Peter C. Searson, et al.
JES
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry