K.N. Tu
Materials Science and Engineering: A
The structure of the Si(111)-CaF2 interface has been determined with medium-energy ion scattering and high-resolution transmission electron microscopy. The interface structure is closely related to the bulk crystal structure of CaSi2. The interface is deficient in F, resulting in Si-Ca bonding and a charge-neutral interface. © 1989, American Vacuum Society. All rights reserved.
K.N. Tu
Materials Science and Engineering: A
A. Reisman, M. Berkenblit, et al.
JES
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.