William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A series of poly(di-n-alkylsilanes) having hexyl, heptyl, and octyl side chains have been investigated by spectroscopic methods. Whereas the UV spectrum provided information about the electronic structure of the polymer backbone, IR and Raman methods have been used to characterize the molecular conformation of both the main and side chains. These structural studies were correlated with results from thermal analyses and X-ray diffraction measurements. A mechanism involving the melting of the n-alkyl side chains with a subsequent disordering of the polymer backbone is proposed. © 1986, American Chemical Society. All rights reserved.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
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Physical Review B
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MRS Fall Meeting 2020
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SPIE Advanced Lithography 2008