E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications