Summary Abstract: Comparison between the adsorption of PH3 and B2H6 on Si surfaces as related to the CVD of Si

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01 Jan 1985

Summary Abstract: Comparison between the adsorption of PH₃ and B₂H₆ on Si surfaces as related to the CVD of Si

No abstract available.

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Surface Science

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Physical Review B

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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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Journal of Physics Condensed Matter