Summary Abstract: Comparison between the adsorption of PH3 and B2H6 on Si surfaces as related to the CVD of Si

Paper

01 Jan 1985

Summary Abstract: Comparison between the adsorption of PH₃ and B₂H₆ on Si surfaces as related to the CVD of Si

No abstract available.

Conference paper

M. Hargrove, S.W. Crowder, et al.

IEDM 1998

Conference paper

J.H. Stathis, R. Bolam, et al.

INFOS 2005

Paper

K.N. Tu

Materials Science and Engineering: A

Paper

A.B. McLean, R.H. Williams

Journal of Physics C: Solid State Physics