Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Summary Abstract: Comparison between the adsorption of PH3 and B2H6 on Si surfaces as related to the CVD of Si
Abstract
No abstract available.
Related
R. Ghez, M.B. Small
JES
Ronald Troutman
Synthetic Metals
E. Burstein
Ferroelectrics