William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry