Summary Abstract: Modification of metals by low energy ions during thin film deposition

Paper

01 Jan 1985

Abstract

No abstract available.

Paper

K.N. Tu

Materials Science and Engineering: A

Conference paper

Joy Y. Cheng, Daniel P. Sanders, et al.

SPIE Advanced Lithography 2008

Review

David B. Mitzi

Journal of Materials Chemistry

Paper

J.R. Thompson, Yang Ren Sun, et al.

Physica A: Statistical Mechanics and its Applications