R. Ghez, J.S. Lew
Journal of Crystal Growth
Paper
Summary Abstract: Surface processes in plasma-assisted etching environments
Abstract
No abstract available.
Related
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications