R.D. Allen, R. Soortyakumaran, et al.
J. Photopolym. Sci. Tech.
R.D. Allen, R. Soortyakumaran, et al.
J. Photopolym. Sci. Tech.
R.D. Allen, K.J. Chen, et al.
Microlithography 1995
T. Kajita, Y. Nishimura, et al.
Proceedings of SPIE - The International Society for Optical Engineering
Hiroshi Ito, G.M. Wallraff, et al.
J. Photopolym. Sci. Tech.