David R. Medeiros, Karen E. Petrillo, et al.
Proceedings of SPIE - The International Society for Optical Engineering
David R. Medeiros, Karen E. Petrillo, et al.
Proceedings of SPIE - The International Society for Optical Engineering
Dario L. Goldfarb, Libor Vyklicky, et al.
J. Photopolym. Sci. Tech.
Alexander R. Trimble, David C. Tully, et al.
American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Katherina Babich, Arpan P. Mahorowala, et al.
Microlithography 2003