Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films