Andrea Fasoli, Krystelle Lionti, et al.
ISOEN 2017
Nanopores created by micellar star polymers in amorphous organic silsequioxane thermosets produce morphologically controlled porous materials for semiconductor chip applications (see picture). Pore size is independent of concentration and processing conditions, but depends solely on the size of the polymer molecule.
Andrea Fasoli, Krystelle Lionti, et al.
ISOEN 2017
Linda K. Sundberg, Gregory M. Wallraff, et al.
SPIE Advanced Lithography 2011
Brian C. Berry, Gurpreet Singh, et al.
ACS Macro Letters
Eric Drockenmuller, Lucy Y. T. Li, et al.
J Polym Sci Part A