William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A unimolecular templating star-shaped polymer with a compatibilizing outer corona, prepared by tandem ROP/ATRP procedures, was dispersed into a thermosetting organosilicate. The organic polymer was thermalized to leave behind its latent image in the matrix with a pore size that reflected the size of the polymer molecule, and provided the expected reduction in dielectric constant.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
K.N. Tu
Materials Science and Engineering: A
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures