Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The determination of the copolymer composition as a function of molecular weight by preparative gel permeation chromatography (GPC) for a poly(styrene‐co‐vinyl stearate) sample is described. These results were compared to data obtained on the same copolymer by the previously described rapid stop‐and‐go GPC/IR method of analysis of copolymer composition as a function of molecular weight and found to be in good agreement. Copyright © 1976 John Wiley & Sons, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
P. Alnot, D.J. Auerbach, et al.
Surface Science
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992