Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
The determination of the copolymer composition as a function of molecular weight by preparative gel permeation chromatography (GPC) for a poly(styrene‐co‐vinyl stearate) sample is described. These results were compared to data obtained on the same copolymer by the previously described rapid stop‐and‐go GPC/IR method of analysis of copolymer composition as a function of molecular weight and found to be in good agreement. Copyright © 1976 John Wiley & Sons, Inc.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Ronald Troutman
Synthetic Metals
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films