Evaluation of 32nm Advanced immersion lithography pellicles
N. Zhou, K. Racette, et al.
SPIE Photomask Technology + EUV Lithography 2008
A new experimental technique combining molecular beams, photoionization, and guided beam ion optics has been used to study several isotopic H 2+ + H2 reactions. The technique is described. By using this method we are able to observe the effects of both reagent translational and vibrational energy. Cross sections are reported for charge transfer, H3+ formation, and collision induced dissociation. Evidence is seen for competition betwen the channels, charge hopping in the reaction entrance channel, potential energy surface hopping, reaction on excited potential surfaces, and isotopic scrambling. A model for the reaction which takes into account the multisurface nature of the systems seems to explain the results satisfactorily. © 1981 American Institute of Physics.
N. Zhou, K. Racette, et al.
SPIE Photomask Technology + EUV Lithography 2008
F.A. Houle
Proceedings of SPIE 1989
W.D. Hinsberg, F.A. Houle, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
F.A. Houle
Applied Physics A Solids and Surfaces