Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
No abstract available.
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007