Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A technique is described for growing (SN)x crystals which have superior electrical properties to those reported previously. The room temperature electrical conductivity has increased, so has the ratio of the room temperature and 4°K resistivities. There is no conductivity maximum in the region 20-30°K and the superconducting transition temperature is higher. © 1975.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
Ming L. Yu
Physical Review B