O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
A dual delay line surface acoustic wave (SAW) sensor on an ST-quartz substrate has been used to study water uptake and downtake and its effect on adhesion in both cured and uncured polyimide films. Film samples both with and without adhesion promoter have been studied. The experimental results suggest the possibility of using a SAW sensor as a cure indicator, humidity sensor or adhesion sensor. © 1991.
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997