The use of the low voltage SEM in IC fabrication

W. Molzen, Michael G. Rosenfield, et al.

Proceedings of SPIE 1989

Michael G. Rosenfield, Douglas S. Goodman, et al.

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

W. Hwang, C.T. Chuang, et al.

International Journal of Electronics

Michael G. Rosenfield

Scanning Electron Microscopy