Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
No abstract available.
J. LaRue, C. Ting
Proceedings of SPIE 1989
Robert Manson Sawko, Malgorzata Zimon
SIAM/ASA JUQ
Richard M. Karp, Raymond E. Miller
Journal of Computer and System Sciences
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis