Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Paper
Thermal diffusivity measurements of thin films with a pyroelectric calorimeter
Abstract
The use of pyroelectric polyvinylidene fluoride calorimeters for the measurement of thermal diffusivities of thin films is described. The potential of this detection scheme combined with photothermal excitation is demonstrated on polymer films with thickness in the 1 μm range. © 1985 Springer-Verlag.
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