Hiroshi Ito, G.M. Wallraff, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paper
Thermolysis of selected polymethacrylates
Abstract
A report is presented on the thermal decomposition behavior of several polymethacrylates and the effect of the ester structure on the thermolysis in correlation with the photosensitivity in acid-catalyzed thermolysis. Differential scanning calorimetry (DSC) curves of the polymethacrylates and presented together with that of PMAA Polymethacrylic Acid PMAA loses absorbed water below 140°C (1st heating), and then dehydrates to form PMAN, at the temperature ranging from 180 to 260°C.
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