Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Journal of Physics and Chemistry of Solids
R.W. Gammon, E. Courtens, et al.
Physical Review B
M. Hargrove, S.W. Crowder, et al.
IEDM 1998