William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Lawrence Suchow, Norman R. Stemple
JES
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000