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Photomask and Next-Generation Lithography Mask Technology 2004
The authors explore the interplay between radar detection and tomographic reconstruction techniques. On the other hand, classical tomography yields an algorithm for range-velocity determination. On the other hand, radar detection gives rise to a new type of tomographic reconstruction problem.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
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SPIE Optical Science, Engineering, and Instrumentation 1998
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BACUS Symposium on Photomask Technology and Management 1991
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SPIE Advanced Lithography 2007