J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Evaporated Pd80Si20 and sputtered Gd16Co84 amorphous films were studied for structural relaxation during annealing with a Seeman-Bohlin X-ray diffractometer and for atomic diffusion using radioactive Au195 and Co57 tracers. The diffusion parameters for these two kinds of films with pre-annealing are presented. © 1982.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989