Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Service-oriented technology enables software to be invoked with universal interface. Enterprises can employ this technology to assist business process integration in enhancing adaptability and flexibility. However, adoption of service-oriented technology could result in trustworthiness problems, for example, how to ensure the dependability of services? How to ensure that all found services will work as expected? How to manage trust relationships among partners and customers? In this paper, we analyse trustworthiness from three perspectives namely structure, service and management. For each identified issue, we have addressed corresponding guidelines to help enterprises perform trustworthy service-oriented business process integration. Copyright © 2007 Inderscience Enterprises Ltd.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Imran Nasim, Michael E. Henderson
Mathematics
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
T. Graham, A. Afzali, et al.
Microlithography 2000