Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A spherical harmonics expansion method of the Boltzmann Transport Equation (BTE) is applied to investigate the carrier energy spectrum of a two-dimensional MOSFET up to 3 eV. By this method hot-electron population is obtained all over the device cross-section without the problems of statistical noise and large computational requirements typical of Monte Carlo methods. © 1993.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
E. Burstein
Ferroelectrics
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME