S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
No abstract available.
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007