Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
X-ray diffraction with synchrotron radiation is used to study the structure and epitaxy of a thin (~ 250 Å) anodic film grown slowly on the basal plane of single-crystal Ti. Anatase crystallites, roughly 130 Å in diameter, are observed, with no indication of other forms of TiO2 or films with lower oxidation state. The oxide is more orientationally disordered than films grown on the (1120) and (1010) faces of Ti, but it exhibits weak six- and twelve-fold texturing by the metal sublayer. In situ and ex situ measurements are qualitatively similar, suggesting that the oxide does not change appreciably upon emersion. © 1994.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
T.N. Morgan
Semiconductor Science and Technology