William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
The nature of the interfacial roughness in Ni0.81Fe0.19/Au multilayers was studied using x-ray diffuse scattering. Using an image-plate detector this scattering could be observed to an extended momentum transfer. The roughness exponent and the cutoff length of the interfacial height-height self-correlation function could thereby be determined using a model of conformal roughness, for which the interfaces are smooth within the cutoff length. We also show that while the roughness is not conformal for short length scales, a transition to conformal behavior occurs from 25 to 100. © 1995 The American Physical Society.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Peter J. Price
Surface Science
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano