Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The World Wide Web Consortium has convened a working group to design a query language for Extensible Markup Language (XML) data sources. This new query language, called XQuery, is still evolving and has been described in a series of drafts published by the working group. XQuery is a functional language comprised of several kinds of expressions that can be nested and composed with full generality. It is based on the type system of XML Schema and is designed to be compatible with other XML-related standards. This paper explains the need for an XML query language, provides a tutorial overview of XQuery, and includes several examples of its use.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Apostol Natsev, Alexander Haubold, et al.
MMSP 2007
Arun Viswanathan, Nancy Feldman, et al.
IEEE Communications Magazine
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998