Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
No abstract available.
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989