The adsorption and decomposition of organometallics on GaAs(001) surfaces studied with high-resolution electron energy-loss spectroscopy
- A. Närmann
- M.L. Yu
- 1992
- Surface Science
Paper
Publications
66 results for Ming L. Yu
Surface reactions in the chemical vapor deposition of tungsten using WF6 and SiH4 on Al, PtSi, and TiN
- Ming L. Yu
- Kie Y. Ahn
- et al.
- 1990
- Journal of Applied Physics
PaperPyrolysis of trimethylgallium on GaAs(100) surfaces
- Ulrich Memmert
- Ming L. Yu
- 1990
- Applied Physics Letters
PaperMechanisms controlling temperature dependent mechanical and electrical behavior of SiH4 reduced chemically vapor deposited W
- R.V. Joshi
- V. Prasad
- et al.
- 1990
- Journal of Applied Physics
PaperAngular anisotropy in ion-surface charge transfer
- Ming L. Yu
- Benjamin N. Eldridge
- 1990
- Physical Review B
PaperLocal catalytic effect of cesium on the oxidation of silicon
- Hans-Joachim Ernst
- Ming L. Yu
- 1990
- Physical Review B
PaperSurface chemistry of the WF6-based chemical vapor deposition of tungsten
- M.L. Yu
- K.Y. Ahn
- et al.
- 1990
- IBM J. Res. Dev
PaperInfluence of the 7×7-1×1 phase transition on the sticking of oxygen on Si(111)
- Ulrich Memmert
- Ming L. Yu
- 1989
- Chemical Physics Letters
PaperReaction of trimethylgallium in the atomic layer epitaxy of GaAs (100)
- Ming L. Yu
- Ulrich Memmert
- et al.
- 1989
- Applied Physics Letters
PaperGas/surface reactions in the chemical vapor deposition of tungsten using WF6/SiH4mixtures
- Ming L. Yu
- Benjamin N. Eldridge
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper