Spatially resolved optical emission studies of fluorocarbon RF plasma through the use of UV-transmitting optical fibers
- G.S. Selwyn
- E. Kay
- 1985
- Plasma Chemistry and Plasma Processing
Paper
Publications
25 results for G.S. Selwyn
Studies of atomic oxygen in O2+CF4 rf discharges by two-photon laser-induced fluorescence and optical emission spectroscopy
- R.E. Walkup
- K.L. Saenger
- et al.
- 1985
- The Journal of Chemical Physics
PaperLaser detection of diatomic products of plasma sputtering and etching
- R.E. Walkup
- Ph. Avouris
- et al.
- 1984
- Applied Physics Letters
PaperCOMPARATIVE MEASUREMENTS OF PLASMA O ATOM CONCENTRATION BY SIMULTANEOUS TWO-PHOTON LASER-INDUCED FLUORESCENCE AND OPTICAL EMISSION ACTINOMETRY.
- K.L. Saenger
- R.E. Walkup
- et al.
- 1983
- ECS Meeting 1983
Conference paperLASER-INDUCED FLUORESCENCE DETECTION OF DIATOMIC PRODUCTS OF REACTIVE ION ETCHING: SiN, SiO, AND SiF.
- R.E. Walkup
- Ph. Avouris
- et al.
- 1983
- MRS Symposium 1983
Conference paper