Synchrotron photoemission investigation: Fluorine on silicon surfaces
- J.F. Morar
- F.R. McFeely
- et al.
- 1984
- Applied Physics Letters
Paper
Publications
3 results for N.D. Shinn
Synchrotron photoemission investigation of the initial stages of fluorine attack on Si surfaces: Relative abundance of fluorosilyl species
- F.R. McFeely
- J.F. Morar
- et al.
- 1984
- Physical Review B
PaperSpectroscopic characterization of fluorinated silicon single crystal surfaces
- J.F. Morar
- F.R. McFeely
- 1984
- JVSTA
Paper