LOW DEFECT DENSITY INSULATING FILMS DEPOSITED ON ROOM TEMPERATURE SUBSTRATES.
- J.H. Magerlein
- John M. Baker
- et al.
- 1984
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
4 results for M.J. Palmer
Magnetic field enhanced reactive ion etching of polyimide
- J.T.C. Yeh
- K.R. Grebe
- et al.
- 1984
- JVSTA
PaperPluggable Connectors for Josephson Computers
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- Pieter Geldermans
- et al.
- 1982
- IEEE Transactions on Components, Hybrids, and Manufacturing Technology
PaperPackaging Technology for Josephson Integrated Circuits
- Syamal K. Lahiri
- H. Randall Bickford
- et al.
- 1982
- IEEE Transactions on Components, Hybrids, and Manufacturing Technology
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