AMBIENT GAS EFFECTS ON THE REACTION OF TITANIUM WITH SILICON.
- Subramanian S. Iyer
- C.-Y. Ting
- et al.
- 1983
- VLSI Science and Technology 1983
Conference paper
Publications
34 results for C.-Y. Ting
INTERACTION BETWEEN Ti AND SiO//2.
- C.-Y. Ting
- M. Wittmer
- et al.
- 1983
- ECS Meeting 1983
Conference paperINTERACTION BETWEEN Ti AND SiO//2.
- C.-Y. Ting
- M. Wittmer
- et al.
- 1983
- VLSI Science and Technology 1983
Conference paperTiN as a high temperature diffusion barrier for arsenic and boron
- C.-Y. Ting
- 1984
- Thin Solid Films
PaperElectromigration Lifetime Sudies of Submicrometer-Linewidth Al-Cu Conductors
- Subramanian S. Iyer
- Chung-YU Ting
- 1984
- IEEE T-ED
PaperSILICIDE FOR CONTACTS AND INTERCONNECTS.
- C.-Y. Ting
- 1983
- IEDM 1983
Conference paperInvestigation of the Al/TiSi2/Si contact system
- Chung Yu Ting
- Marc Wittmer
- 1983
- Journal of Applied Physics
PaperOxidation of silicide thin films: TiSi2
- F.M. D'Heurle
- E.A. Irene
- et al.
- 1983
- Applied Physics Letters
PaperRedistribution of As during Pd2Si formation: Electrical measurements
- M. Wittmer
- C.-Y. Ting
- et al.
- 1983
- Journal of Applied Physics
PaperInvestigation of Tin films reactively sputtered using a sputter gun
- K.Y. Ahn
- M. Wittmer
- et al.
- 1983
- Thin Solid Films
Paper