Surface grid technique for noncontact e-beam testing of very large scale integrated package substrate
- Kam-Leung Lee
- C.H. Schaefer
- et al.
- 1991
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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Publications
60 results for D. Kern
A study of proximity effects at high electron-beam voltages for x-ray mask fabrication part 1: Additive mask processes
- Michael G. Rosenfield
- S. Rishton
- et al.
- 1991
- Microelectronic Engineering
PaperFabrication of sub-100nm dual-gate MODFETS with enhanced performance
- K.Y. Lee
- K. Ismail
- et al.
- 1991
- Microelectronic Engineering
PaperMiniature Electron-Optical Columns
- T.H.P. Chang
- D. Kern
- et al.
- 1991
- IEEE T-ED
PaperImages of a microelectronic device with the X1-SPEM, a first generation scanning photoemission microscope at the National Synchrotron Light Source
- H. Ade
- J. Kirz
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperX-ray spectromicroscopy with a zone plate generated microprobe
- Harald Ade
- Janos Kirz
- et al.
- 1990
- Applied Physics Letters
PaperScanning photoelectron microscope with a zone plate generated microprobe
- Harald Ade
- Janos Kirz
- et al.
- 1990
- Nuclear Inst. and Methods in Physics Research, A
PaperThe scanning transmission microscope at the NSLS
- Harvey Rarback
- Chris Buckley
- et al.
- 1990
- Nuclear Inst. and Methods in Physics Research, A
PaperX-ray Microscopy with the NSLS Soft X-ray Undulator
- Janos Kirz
- Harald Ade
- et al.
- 1990
- Physica Scripta
PaperSoft X-ray Microscopy in Biology and Medicine: Status and Prospects
- Stephen Rothman
- Erik Anderson
- et al.
- 1990
- Physica Scripta
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