Photolithography illumination needs
- Douglas S. Goodman
- Janusz Wilczynski
- 1985
- Nuclear Inst. and Methods in Physics Research, A
Paper
Publications
13 results for Janusz Wilczynski
The calculation of wave aberration coefficients and wave aberration derivatives from ray trace data
- J.S. Wilczynski
- R.E. Tibbetts
- 1989
- Proceedings of SPIE 1989
Conference paperDesign and fabrication of microelectronic lenses
- R.E. Tibbetts
- J.S. Wilczynski
- 1989
- Proceedings of SPIE 1989
Conference paper