Tunable anti-reflective coatings with built-in hard mask properties facilitating thin resist processing
- Arpan P. Mahorowala
- Katherina Babich
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
Publications
50 results for V.V. Patel
Ultralow-k dielectrics prepared by plasma-enhanced chemical vapor deposition
- A. Grill
- V.V. Patel
- 2001
- Applied Physics Letters
PaperTribological and mechanical properties of diamond-like carbon prepared by high-density plasma
- J.C. Sánchez-López
- C. Donnet
- et al.
- 2001
- Diamond and Related Materials
PaperNovel low-k dual-phase materials prepared by PECVD
- A. Grill
- V.V. Patel
- 2000
- MRS Proceedings 2000
Conference paperDiamond-like carbon prepared by high density plasma
- J.C. Sánchez-López
- C. Donnet
- et al.
- 2000
- Diamond and Related Materials
PaperLow dielectric constant SiCOH films as potential candidates for interconnect dielectrics
- A. Grill
- L. Perraud
- et al.
- 1999
- MRS Spring Meeting 1999
PaperSolid state 13C and 1H nuclear magnetic resonance investigations of hydrogenated amorphous carbon
- C. Donnet
- J. Fontaine
- et al.
- 1999
- Journal of Applied Physics
PaperLow dielectric constant films prepared by plasma-enhanced chemical vapor deposition from tetramethylsilane
- A. Grill
- V.V. Patel
- 1999
- Journal of Applied Physics
PaperEELS analysis of hydrogenated diamond-like carbon films
- L. Ponsonnet
- C. Donnet
- et al.
- 1998
- Thin Solid Films
PaperIntegration issues for diamond like carbon in a copper damascene process flow
- A. Grill
- C.V. Jahnes
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paper