A comparison of C54-TiSi2 formation in blanket and submicron gate structures using in situ x-ray diffraction during rapid thermal annealing
- J. Bucchignano
- G.B. Stephenson
- et al.
- 1995
- Journal of Materials Research
Paper
Publications
48 results for R.A. Roy
In situ x-ray diffraction analysis of the C49-C54 titanium silicide phase transformation in narrow lines
- R.A. Roy
- L. Clevenger
- et al.
- 1995
- Applied Physics Letters
PaperProperties of amorphous diamond films prepared by a filtered cathodic arc
- Richard Lossy
- David L. Pappas
- et al.
- 1995
- Journal of Applied Physics
PaperStudy of C49-TiSi2 and C54-TiSi2 formation on doped polycrystalline silicon using in situ resistance measurements during annealing
- L. Clevenger
- R. Mann
- et al.
- 1994
- Journal of Applied Physics
PaperCrystallographic evolution of microstructure in thin film processing: Part I. grain size distribution
- J. Trogolo
- R.A. Roy
- et al.
- 1994
- Journal of Electronic Materials
PaperPhase formation and microstructure changes in tantalum thin films induced by bias sputtering
- Philippe Catania
- Ronnen A. Roy
- et al.
- 1993
- Journal of Applied Physics
PaperThe growth of crystalline vapor deposited carbon-60 thin films
- W. Krakow
- N.M. Rivera
- et al.
- 1993
- Applied Physics A Solids and Surfaces
PaperPulsed laser deposition of high-epsilon dielectrics: PMN and PMN-PT
- K.L. Saenger
- R.A. Roy
- et al.
- 1992
- MRS Proceedings 1992
Conference paperLow energy ion-assisted deposition of metal films
- Ronnen Roy
- 1992
- Surface and Coatings Technology
PaperFiltered arc deposition of amorphous diamond
- Richard Lossy
- David L. Pappas
- et al.
- 1992
- Applied Physics Letters
Paper