Light scattering properties of x-ray lithography mask substrates
- J.R. Maldonado
- Y. Vladimirsky
- et al.
- 1991
- Microelectronic Engineering
Paper
Publications
7 results for Y. Vladimirsky
Thermoelastic effects in x-ray lithography masks during synchrotron storage ring irradiation
- Y. Vladimirsky
- J.R. Maldonado
- et al.
- 1990
- Microelectronic Engineering
PaperSoft-x-ray imaging with the 35 period undulator at the NSLS
- C. Buckley
- H. Rarback
- et al.
- 1989
- Review of Scientific Instruments
PaperThe interior of a whole and unmodified biological object - the zymogen granule - viewed with a high-resolution X-ray microscope
- S. Rothman
- N. Iskander
- et al.
- 1989
- BBA - General Subjects
PaperScanning x-ray microscope with 75-nm resolution
- H. Rarback
- D. Shu
- et al.
- 1988
- Review of Scientific Instruments
PaperZone plate lenses for X-ray microscopy
- Y. Vladimirsky
- D. Kern
- et al.
- 1988
- Nuclear Inst. and Methods in Physics Research, A
PaperFabrication of free-standing x-ray transmission gratings and zone plates
- Y. Vladimirsky
- E. Kallne
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper