Thermoelastic effects on x-ray lithography masks under pulsed irradiation
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- Microelectronic Engineering
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Publications
3 results for D. Katcoff
The use of simulation in semiconductor technology development
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- Solid State Electronics
PaperFully scaled 0.5 μm MOS circuits by synchrotron radiation X-ray lithography: Devices fabrication and overlay evaluation
- J. Silverman
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- Microelectronic Engineering
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