Publications

3 results for M. Jost

Fully self-aligned epitaxial-base transistor
- - R. Schulz
  - M. Jost
  - et al.
- 1989
- VLSI Technology 1989
Conference paper
A new planarization technique, using a combination of RIE and chemical mechanical polish (CMP)
- - B. Davari
  - C. Koburger
  - et al.
- 1989
- IEDM 1989
Conference paper
On the preparation of cross-sectional TEM samples using lithographic processing and reactive ion-etching
- - J.T. Wetzel
  - M. Jost
  - et al.
- 1989
- Ultramicroscopy
Paper