Publications

76 results for E. Gusev

80 nm poly-silicon gated n-FETs with ultra-thin Al₂O₃ gate dielectric for ULSI applications
- - D.A. Buchanan
  - E. Gusev
  - et al.
- 2000
- IEDM 2000
Conference paper
Isotopic labeling studies of interactions of nitric oxide and nitrous oxide with ultrathin oxynitride layers on silicon
- - H.C. Lu
  - E. Gusev
  - et al.
- 2000
- Journal of Applied Physics
Paper
Structure and stability of ultrathin zirconium oxide layers on Si(001)
- - M. Copel
  - M. Gribelyuk
  - et al.
- 2000
- Applied Physics Letters
Paper
High-resolution depth profiling in ultrathin Al₂O₃ films on Si
- - E. Gusev
  - M. Copel
  - et al.
- 2000
- Applied Physics Letters
Paper
Vacancy mechanism of the anomalous behavior of surface atoms at elevated temperatures
- - Yu.N. Devyatko
  - S.V. Rogozhkin
  - et al.
- 1999
- Journal of Experimental and Theoretical Physics
Paper
Ultrathin nitrided gate dielectrics by plasma-assisted processing
- - E. Gusev
  - D.A. Buchanan
  - et al.
- 1999
- Microelectronic Engineering
Paper