Publications

2 results for Y.C. Ee

UV curing-induced photoresist poisoning in advanced ULK BEOL integration schemes
- - Y.C. Ee
  - D. Kioussis
  - et al.
- 2009
- ADMETA 2009
Conference paper
32nm general purpose bulk CMOS technology for high performance applications at low voltage
- - F. Arnaud
  - J. Liu
  - et al.
- 2008
- IEDM 2008
Conference paper